SPEC-ID: DB-2026 // TURBOMOLECULAR PUMPS
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GOREVUN.ENG ULTRA-HIGH VACUUM (UHV) PHYSICS & MOLECULAR FLOW METROLOGY
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Mass Spectrometry

Quadrupole Residual Gas Analyzers: RF-DC Mass Filtering and Outgassing Diagnostics

Employing electron impact ionization and four parallel hyperbolic rods to identify sub-nanobar partial pressures of water, carbon monoxide, and hydrocarbons.

By Klaus Lindemann, Analytical Instrument Specialist September 07, 2026 • 8 min read
Quadrupole Residual Gas Analyzers: RF-DC Mass Filtering and Outgassing Diagnostics

Electron Impact Ionization and Hyperbolic RF Filtering

Electrons emitted by hot tungsten filaments ionize gas molecules; superimposed RF and DC voltages allow only specific mass-to-charge ions to pass.

Distinguishing Carbon Monoxide (m/z 28) from Nitrogen

High-resolution mass filtering separates identical molecular weight peaks by analyzing secondary cracking fragment patterns (m/z 12 vs 14).

Detecting Fingerprint Hydrocarbon Contamination

Surging mass peaks at m/z 43, 57, and 71 instantly alert vacuum technicians to backstreaming mechanical pump oil vapors.

⚠️ Technical & Safety Verification

The empirical methods outlined in this study reflect verified ultra-high vacuum (uhv) physics & molecular flow metrology protocols and field measurements. Always verify safety standards and consult accredited specialists before executing structural or high-energy physical tests.

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